| 摘要 |
<p>The present invention relates to a device and a method for detecting the damage to a substrate capable of measuring the quantities of electric charge depending on the vertical and lateral ripples of a substrate when the vertical substrate is transferred, and detecting the damage to the transferred substrate based on the measured quantities of electric charge. According to an embodiment of the present invention, the device for detecting the damage to a substrate comprises: multiple sensor parts formed in one side of the substrate and measuring the quantities of electric charge depending on the vibration of the substrate; a transmission part for transmitting the quantities of electric charge measured by the sensor parts and the identification information of the sensor parts; a receiving part for receiving the quantities of electric charge transmitted from the transmission part and the identification information of the sensor parts; and a control part for determining whether or not the substrate is damaged based on the received quantities of electric charge and generating an informing signal when the substrate is damaged. [Reference numerals] (100) Guide rail; (200) Base plate; (300) Clamp; (400) Device for detecting the damage to a substrate</p> |
