发明名称 OMITTED
摘要 The present invention relates to an electron microscope having lens with electric field method. The electron microscope of the present invention has a structure comprising a lens body with an electric beam passing hole that enables an electric beam to penetrate through, condenser lens and objective lens which collect the electric beam centrally and has a ground processing unit located symmetrically to the hole. The electron microscope of the present invention is equipped with the condenser lens and objective lens that authorizes high voltage in order to collect the electric beam, and it is performed by the electric field forming type rather than by the magnetic field forming type, so the size of the condenser lens and objective lens are minimized which further allows the size of the electron microscope smaller.
申请公布号 KR20140015834(A) 申请公布日期 2014.02.07
申请号 KR20120081216 申请日期 2012.07.25
申请人 SEOUL NATIONAL UNIVERSITY OF TECHNOLOGY CENTER FOR INDUSTRY COLLABORATION 发明人 PARK, MAN JIN;JANG, DONG YOUNG;KIM, SEUNG JAE
分类号 H01J37/26;H01J37/12 主分类号 H01J37/26
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