| 摘要 |
A vacuum chamber module for stable robot teaching is provided to enable a driving frame to keep the own position although a bottom plane of the chamber is transformed by vacuum pressure by fixing the driving frame on a support frame of a vacuum chamber. A vacuum chamber is installed at the uniform height from the ground by a support frame. A transfer robot(40) comprises a driving frame(41) which is installed by passing a lower surface of the vacuum chamber, a driving shaft(43) which extends from the upper end of the driving frame, a robot arm(44) which is connected with the driving shaft, and a substrate storage part(45) which is connected with the end of the robot arm. One end of a fixing member(60) is connected to the driving frame of the transfer robot, and the other end is connected to a support frame(50) of the vacuum chamber. A bellows is installed between the lower surface and the driving frame. |
