| 摘要 |
In a manufacturing method of a light emitting apparatus, an array of light emitting elements is formed on a substrate. A first lens-pillar-material layer is formed on the array, and first lens pillars are formed on the light emitting elements of the array by performing a photolithographic process on the first lens-pillar-material layer. A lens-portion-material layer is laminated on the first lens pillar using a dry film resist so that gaps are left between the first lens pillars. A plurality of lens portions that correspond to the first lens pillars are formed by performing a heat treatment on the first lens-portion-material layer so that it is softened and enters the gaps. The first lens pillars and the lens portions constitute a lens array that focuses light emitted by the light emitting elements. |
