发明名称 OBSERVATION DEVICE
摘要 <p>In order to reduce both the luminance irregularity inside a frame and the luminance irregularity between frames, an example of an observation device according to the present invention comprises an illumination optical system for illuminating a sample with laser light from a laser light source, and an imaging unit for repeatedly imaging the sample illuminated by the illumination optical system. The illumination optical system includes a light diffusion element and a control unit for periodically changing the diffusion pattern in the region of the light diffusion element onto which the laser light is irradiated. The control unit performs a setting so that the changes in the diffusion pattern during imaging operation match with each other among a plurality of the repeated imaging operations.</p>
申请公布号 WO2014020911(A1) 申请公布日期 2014.02.06
申请号 WO2013JP04640 申请日期 2013.07.31
申请人 NIKON CORPORATION 发明人 OUCHI, YUMIKO
分类号 G02B21/06;G01N21/64;H04N5/225;H04N5/232;H04N5/238 主分类号 G02B21/06
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