| 摘要 |
<p>A nozzle ejects a functional liquid having a viscosity of not less than 5 millipascal·second and not more than 20 millipascal·second, onto a substrate. The functional liquid inside a pressure chamber connected to the nozzle is pressurized. A drive voltage having a pull waveform element which causes the pressure chamber to expand from a steady state and a push waveform element which causes the expanded pressure chamber to contract, is generated with a relationship between a slopeγ1 representing voltage change per unit time in the pull waveform element, the viscosityηof the functional liquid, a resonance period Tc of the head, and a slopeγ2 representing voltage change per unit time in the push waveform element satisfying (2/Tc)≰γ1≰(η/10) andγ2≰γ1.</p> |
