发明名称 PRESSURE SENSOR AND METHOD OF MANUFACTURING THE SAME
摘要 The present invention provides a pressure sensor simplifying a manufacturing process and having a small size and an excellent sensitivity. According to an embodiment of the present invention, the pressure sensor comprises a circuit board in which cavities are formed; a pressure seating layer changed by external pressure and located to seal the cavities on the circuit board; and a pressure sensing layer located at the lower side of the pressure seating layer by being projected from the circuit board within the cavities and for sensing pressure according to the change of electric resistance values with residual stress generated with the change of the pressure seating layer.
申请公布号 KR20140015088(A) 申请公布日期 2014.02.06
申请号 KR20120082824 申请日期 2012.07.27
申请人 GMEMS CO., LTD. 发明人 KIM, TAE SIK
分类号 G01L9/06;H01L29/84;H01L41/02 主分类号 G01L9/06
代理机构 代理人
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