| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning device including a table difficult to narrow guide or a large table, and capable of obtaining a positioning accuracy of nm order by using an inexpensive rolling guide not requiring a neumatic auxiliary facility of compressed air.SOLUTION: A positioning device including full close control means for measuring the position of a table 2 and performing feedback control of the position is further provided with rolling guides 3, 4 for making the table 2 movable in uniaxial direction, and a ball screw 5 for making the table 2 movable along the rolling guides 3, 4. Friction resistance of the rolling guide 3 is set larger than that of the rolling guide 4, the ball screw 5 is provided between the rolling guide 3 and the rolling guide 4, and the measurement position for measuring the position of the table 2 is located closer to the rolling guide 4 side than the ball screw 5. |
