| 摘要 |
PROBLEM TO BE SOLVED: To reduce microvibration transmitted to a mounted object when a slider travels at high speed and at high acceleration/deceleration in an actuator including a slider performing reciprocating movement along a guide rail by a belt drive.SOLUTION: A slide 3 includes three pairs or more of bearings 31 for belt connection and bearings 32 for fixing a mounted object along a movement direction. At the bearing 31 for belt connection, an end part 11 of a belt 1 is fixed at a gravity center position of a slider or in its vicinity. At the bearing 32 for fixing a mounted object, the end part 11 of the belt 1 is not fixed. The bearing 31 for belt connection and the bearing 32 for fixing a mounted object are connected in such a manner that they do not deform substantially in the movement direction of the slider 3 but elastically deformable in the direction other than the movement direction of the slider 3, for example, by using a flat plate spring 8 and plate springs 81 and 82. |
