发明名称 ETCHANT COMPOSITION AND MANUFACTURING METHOD FOR THIN FILM TRANSISTOR USING THE SAME
摘要 An etchant composition includes ammonium persulfate (((NH4)2)S2O8), an azole-based compound, a water-soluble amine compound, a sulfonic acid-containing compound, a nitrate-containing compound, a phosphate-containing compound, a chloride-containing compound, and residual water.
申请公布号 US2014038348(A1) 申请公布日期 2014.02.06
申请号 US201213728348 申请日期 2012.12.27
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 KIM BONG-KYUN;PARK HONG SICK;LEE WANG WOO;MOON YOUNG MIN;YOON SEUNG HO;CHOI YOUNG JOO;KIM SANG-WOO;LEE KI-BEOM;LEE DAE-WOO;CHO SAM-YOUNG
分类号 H01L21/465;H01L29/66 主分类号 H01L21/465
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