| 发明名称 |
SEMICONDUCTOR STRUCTURE AND PROCESS THEREOF |
| 摘要 |
A semiconductor structure includes a substrate, a recess and a material. The recess is located in the substrate, wherein the recess has an upper part and a lower part. The minimum width of the upper part is larger than the maximum width of the lower part. The material is located in the recess. |
| 申请公布号 |
US2014038417(A1) |
申请公布日期 |
2014.02.06 |
| 申请号 |
US201314054811 |
申请日期 |
2013.10.15 |
| 申请人 |
UNITED MICROELECTRONICS CORP. |
发明人 |
LIN YING-CHIH;CHEN HSUAN-HSU;LIAO JIUNN-HSIUNG;KUO LUNG-EN |
| 分类号 |
H01L21/311 |
主分类号 |
H01L21/311 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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