DISPLAY DEVICE AND METHOD OF MANUFACTURING THE SAME

摘要

A display device, according to an embodiment of the present invention, comprises: a first substrate; a gate line placed on the first substrate and includes a gate electrode; a gate dielectric film placed on the gate line; a semiconductor layer placed on the gate dielectric film; a data line placed on the semiconductor layer and includes a source electrode; a drain electrode facing the source electrode on the semiconductor layer; and a protective film placed on the data line and the drain electrode. The semiconductor layer is comprised of an oxide semiconductor containing indium, tin, and zinc. Atomic percentage of indium for the oxide semiconductor is 10 to 90 at%, atomic percentage of zinc is 5 to 60 at%, and atomic percentage of tin is 5 to 45 at%. The data line and the drain electrode are comprised of copper-based metals such as a copper or a copper alloy.