| 摘要 |
PROBLEM TO BE SOLVED: To provide a method by which not only the shape of a prescribed groove but also any interruption in a groove and non-groove concave shapes can be evaluated to enable the whole process of groove cutting from printing a resist to etching can be evaluated.SOLUTION: The surface shape of a steel plate having undergone surface processing is measured (43) to detect a plurality of concave shapes (44). On the basis of the result of concave shape detection, evaluation indicators in the processed state of the steel plate are calculated (48). As evaluation indicators, one or more of the occurrence frequency of groove interruptions, which means the absence of groove where a groove should have been formed, the occurrence frequency of non-groove concave shapes, which are not grooves, out of the detected concave shapes, statistical values of the widths of the concave shapes, statistical values of the depths of the concave shapes, and statistical values of the products of multiplication of the widths and depths of the concave shapes, of every predetermined range of the steel plate surface, are used. On the basis of one or more of these evaluation indicators, the processed state of the steel plate is evaluated (49). |
