发明名称 |
MEMS DEVICE, ELECTRONIC APPARATUS, AND MANUFACTURING METHOD OF MEMS DEVICE |
摘要 |
A MEMS device is a MEMS device having a MEMS vibrator which includes a plurality of MEMS constituent elements laminated and formed above a first foundation portion which is laminated above a main surface of a wafer substrate, and the MEMS constituent elements are laminated above a first oxide film and a nitride film so as to cover an opening which is formed in the nitride film and exposes a second foundation portion above which the nitride film is laminated. |
申请公布号 |
US2014035433(A1) |
申请公布日期 |
2014.02.06 |
申请号 |
US201313953092 |
申请日期 |
2013.07.29 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
MATSUZAWA YUSUKE |
分类号 |
H02N1/00;B81B7/00;B81C1/00 |
主分类号 |
H02N1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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