发明名称 METAL WIRING OF SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 A metal wiring for applying a voltage to a semiconductor component of a semiconductor device, the semiconductor device comprising a low voltage applying region adjacent to a high voltage applying region, is provide. The metal wiring includes: an isolator region, a first lower metal layer electrically connected to the semiconductor component, a first upper metal layer configured to be electrically connected to an external power supply, and a plurality of inter-metal dielectric layers deposited between the first lower metal layer and the first upper metal layer, each of the plurality of inter-metal dielectric layers comprising at least one contact plug for providing an electrical connection between the first lower metal layer and the first upper metal layer.
申请公布号 US2014035146(A1) 申请公布日期 2014.02.06
申请号 US201213714866 申请日期 2012.12.14
申请人 KIM KWAN-SOO;LEE TAE-JONG;SHIN KANG-SUP;KIM SI-BUM;KANG YANG-BEOM;JEONG JONG-YEUL 发明人 KIM KWAN-SOO;LEE TAE-JONG;SHIN KANG-SUP;KIM SI-BUM;KANG YANG-BEOM;JEONG JONG-YEUL
分类号 H01L23/485;H01L21/768 主分类号 H01L23/485
代理机构 代理人
主权项
地址