METHOD FOR ADJUSTING POSITION OF SUBSTRATE TRANSFER DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for adjusting a substrate transfer device capable of adjusting a transfer position without using an adjustment jig.SOLUTION: A method for adjusting a position of a substrate transfer device is provided which comprises steps of: holding a substrate by a substrate transfer unit for substrate transfer and detecting a position of the substrate (first detection step); transferring the substrate held by the substrate transfer unit to a substrate rotation unit which holds and rotates the substrate; rotating the substrate held by the substrate rotation unit only at a prescribed angle by the substrate rotation unit; receiving the substrate rotated by the substrate rotation unit from the substrate transfer unit; detecting a position of the substrate received by the substrate transfer unit (second detection step); grasping a rotation center position of the substrate rotation unit on the basis of the substrate position detected by the first detection step and the substrate position detected by the second detection step; and adjusting the position of the substrate transfer unit on the basis of the grasped rotation center position.