| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser processing system and laser processing method that can perform laser processing on a work at a high speed with high definition and that makes it possible to achieve a reduction in costs and a compact design.SOLUTION: In a laser processing method employing a laser processing system 10, first laser light LB1 emitted from a first concentration optical system 16 formed so that a focal length thereof can be varied, and second laser light LB2 that is emitted from a second concentration optical system 18 formed so that the focal length thereof can be varied and that has a wavelength different from that of the first laser light LB1 are coaxially superposed on each other by a dichroic mirror 20. Thereafter, a galvano-scanner 22 is used to scan a work W with the resultant light. |
