发明名称 MEMS DEVICE WITH INCREASED TILTING RANGE
摘要 A micro-electro-mechanical (MEMs) devices including a compound hot electrode, which increases the tilting range of the MEMs device. A substantially vertical hot electrode is mounted adjacent to the end or the sides of a pivoting ground electrode, formed of the underside of a pivoting mirror, and combine with a conventional horizontal hot electrode to make up the compound hot electrode.
申请公布号 US2014035432(A1) 申请公布日期 2014.02.06
申请号 US201213565948 申请日期 2012.08.03
申请人 JIN WENLIN 发明人 JIN WENLIN
分类号 H02N1/00 主分类号 H02N1/00
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