MANUFACTURING METHOD FOR STRESS ADJUSTABLE SINGLE MATERIAL STRUCTURE

摘要

A manufacturing method for a stress adjustable single material structure according to the present invention includes a step of forming a first thin film on a substrate using a first condition; and a step of forming a second thin film on the first thin film using a second condition. The stress of the first and second thin films varies according to the difference between the first and second conditions. The first and second thin films are made of identical materials.