| 摘要 |
PROBLEM TO BE SOLVED: To correctly scribe lines of patterning P2, P3 in parallel with a line of patterning P1 when scribing a thin film solar cell substrate with the patterning P1 having been already formed thereon.SOLUTION: An image processing part reads patterning P1 of a substrate in a predetermined period, and extracts a feature point to be an interval equal to or more than a natural period of a scribe unit when moving the patterning at a moving speed during scribing. A processing head is controlled so as to be in parallel with the scribed line on the basis of position data of the extracted feature point. Consequently, abnormal vibrations are reduced, and processing accuracy is improved to be able to perform scribing without rapidly changing the position of the processing head. |
