发明名称 IMPROVEMENTS IN OR RELATING TO THE MANUFACTURE OF HOLLOW BODIES OF SEMICONDUCTOR MATERIAL
摘要 1,273,097. Hollow bodies of semi-conductor material. SIEMENS A.G. 24 Aug., 1970 [26 Aug., 1969], No. 40616/70. Heading B5A. [Also in Divisions C1 and F2] A hollow body e.g. a tube of semi-conductor material open at least at one end, is prepared by depositing the semi-conductor material e.g. silicon, silicon carbide, germanium from a reaction gas on to a heated carrier body. The carrier body being composed of a material other than the semi-conductor material e.g. graphite and having a higher coefficient of thermal expansion than the semi-conductor material; raising the temperature of the carrier body during the deposition such that cracks appear in the layer of semi-conductor material until the cracks have been covered and thereafter removing the carrier body from the hollow body after cooling.
申请公布号 GB1273097(A) 申请公布日期 1972.05.03
申请号 GB19700040616 申请日期 1970.08.24
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人
分类号 C23C16/44;C23C16/01;C30B29/60 主分类号 C23C16/44
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