OPTICAL PROXIMITY CORRECTION METHOD

摘要

An optical proximity correction (OPC) method, the method comprising: adding to an optical proximity correction procedure a cleaning program for repairing the protrusions caused by the covering of holes; before executing an OPC processing program, running the cleaning program for a target graphic to repair all the protrusions caused by the holes, thus preventing defects from being generated due to the protrusions during OPC processing. The execution of the cleaning program of the present invention relies wholly on graphic software without adjusting the hardware of an existing OPC device, and is automatic and fast, thus having little impact on the period of the process, and greatly saving cost while improving product quality.