摘要 |
The present disclosure relates to a gas sensor for determining substances contained in a gas mixture, comprising a substrate on which a source electrode, a drain electrode and a gate electrode are arranged, at least one electrically insulating layer being arranged between the substrate and the gate electrode, the gate electrode comprising an electrically conductive ceramic material, and the gate electrode having a range of variation of its thickness that is greater than or equal to one quarter of its total thickness. Such a gas sensor may have in particular improved measuring characteristics and, furthermore, allow itself to be produced in an improved way. The present disclosure also relates to a method for producing such a gas sensor. |