发明名称 Flash Memory Utilizing a High-K Metal Gate
摘要 According to one exemplary embodiment, a method for fabricating a flash memory cell in a semiconductor die includes forming a control gate stack overlying a floating gate stack in a memory region of a substrate, where the floating gate stack includes a floating gate overlying a portion of a dielectric one layer. The floating gate includes a portion of a metal one layer and the dielectric o one layer includes a first high-k dielectric material. The control gate stack can include a control gate including a portion of a metal two layer, where the metal one layer can include a different metal than the metal two layer.
申请公布号 US2014038404(A1) 申请公布日期 2014.02.06
申请号 US201314050748 申请日期 2013.10.10
申请人 BROADCOM CORPORATION 发明人 XIA WEI;CHEN XIANGDONG;HUI FRANK
分类号 H01L21/28 主分类号 H01L21/28
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