发明名称 |
VIBRATION PIECE, GYRO SENSOR, ELECTRONIC APPARATUS AND MOVABLE BODY |
摘要 |
PROBLEM TO BE SOLVED: To reduce an impedance of a detection signal of vibration arms by securing electrode areas of the vibration arms, and further to realize a reduction in size of a vibration piece.SOLUTION: A gyro element 2 serving as a vibration piece comprises: first and second detection vibration arms 421 and 422 extending from a base portion 41; hammer head portions 425 and 426 widely provided at leading end portions of the detection vibration arms 421 and 422; first groove portions 423 and 424 that are provided so as to communicate with the detection vibration arms 421 and 422 and the hammer head portions 425 and 426; and second groove portions 429a and 429b provided at both sides of the first groove portion 423 in the hammer head portion 425 via first wall portions 427. |
申请公布号 |
JP2014025742(A) |
申请公布日期 |
2014.02.06 |
申请号 |
JP20120164464 |
申请日期 |
2012.07.25 |
申请人 |
SEIKO EPSON CORP |
发明人 |
MATSUO ATSUSHI |
分类号 |
G01C19/5621;H01L41/08;H01L41/09;H01L41/18 |
主分类号 |
G01C19/5621 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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