发明名称 VIBRATION PIECE, GYRO SENSOR, ELECTRONIC APPARATUS AND MOVABLE BODY
摘要 PROBLEM TO BE SOLVED: To reduce an impedance of a detection signal of vibration arms by securing electrode areas of the vibration arms, and further to realize a reduction in size of a vibration piece.SOLUTION: A gyro element 2 serving as a vibration piece comprises: first and second detection vibration arms 421 and 422 extending from a base portion 41; hammer head portions 425 and 426 widely provided at leading end portions of the detection vibration arms 421 and 422; first groove portions 423 and 424 that are provided so as to communicate with the detection vibration arms 421 and 422 and the hammer head portions 425 and 426; and second groove portions 429a and 429b provided at both sides of the first groove portion 423 in the hammer head portion 425 via first wall portions 427.
申请公布号 JP2014025742(A) 申请公布日期 2014.02.06
申请号 JP20120164464 申请日期 2012.07.25
申请人 SEIKO EPSON CORP 发明人 MATSUO ATSUSHI
分类号 G01C19/5621;H01L41/08;H01L41/09;H01L41/18 主分类号 G01C19/5621
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