| 摘要 |
PROBLEM TO BE SOLVED: To expedite stress measurement by simultaneously acquiring information on diffracted X-rays for a plurality of Ψ angles.SOLUTION: A sample 1 is irradiated with X-rays from a plurality of X-ray sources 21, 22 at a plurality of different incident angles. Each Debye-ring of diffracted X-rays conically radiated from the sample 1 in response to the incident X-rays from each of the X-ray sources 21, 22 is observed, and internal stress of the sample 1 is derived from information recorded on an imaging plate 30 on the diffracted X-rays at an intersection between the Debye-ring of the diffracted X-rays and an equatorial plane H and on diffracted X-rays in the vicinity of the intersection between the Debye-ring and the equatorial plane H. |
