| 摘要 |
Embodiments of the present invention generally comprise a method and apparatus for preparing and bonding a cylindrical sputtering target tube to a backing tube to form a rotary target assembly. In one embodiment, a cylindrical target assembly includes bonding material that has a cylindrical surface and is substantially concentric to the backing tube. In one embodiment, a method for forming a cylindrical target assembly includes filling a gap defined between sputtering target tubes with a spacer. The method also includes removing the spacer after the sputtering target tubes are bonded to a backing tube. In one embodiment, an apparatus for fabricating a cylindrical target assembly comprises of a support tube, two end fittings, and a plurality of clamp elements operable to clamp the support tube between the two end fittings. |
