| 摘要 |
PROBLEM TO BE SOLVED: To provide a test piece subjected to observation with an electron microscope, stress and temperature of which can be directly measured, and a manufacturing method of the test piece.SOLUTION: A test piece (1) subjected to observation with a TEM (transmission electron microscope) includes a stress sensor (10) for measuring stress of the test piece (1). The stress sensor (10) comprises: an insulating material (11) deposited on the surface of an observation region (5) of a base material (1a) composing the test piece (1) or the surface of the vicinity of the region by vapour deposition; and a strain gauge element (measurement element) (13) deposited on the surface of the insulating material (11) by vapour deposition. In addition, the test piece (1) is provided with a terminal part (30) for extracting a measurement signal from the strain gauge element (13). The terminal part (30) comprises: the insulating material (11) deposited on the surface of the base material (1a) by vapour deposition; and a terminal element (31) deposited on the surface of the insulating material (11) by vapour deposition. |
