发明名称 SYSTEM AND METHOD FOR MEASURING ANGULAR LUMINESCENCE IN CHARGED PARTICLE MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To provide an apparatus for determining angular distribution of radiated light, and in particular to provide a user with rotational symmetry essential for a principle in measurement, because cathodoluminescence generated in a scanning electron microscope brings an advantage of localized excitation of individual microscopic structures and, when luminescent structures are characterized, intensity, wavelength, polarization and angular emission of the luminescence are all of interest.SOLUTION: The apparatus is compatible with additional polarization filtering and spectral bandpass filtering methods used to characterize the luminescence and understand a specimen.
申请公布号 JP2014025936(A) 申请公布日期 2014.02.06
申请号 JP20130154820 申请日期 2013.07.25
申请人 GATAN INC 发明人 DAVID STOWE;SIMON ANDREW GALLOWAY;JAMES PARSONS
分类号 G01N21/62;H01J37/244 主分类号 G01N21/62
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