| 摘要 |
The present invention is related to the in-line determination of thickness, optical properties and quality of thin films and multilayer structures of organic (conductors, semiconductors and insulators), hybrid (organic/inorganic) and inorganic (e.g. metals, oxides) materials in real-time by the use of Spectroscopic Ellipsometry-SE, during their printing and/or treating by roll-to-roll and sheet-to-sheet processes. SE unit is located on a stage with the possibility of movement in the lateral direction in relation to the movement of e.g. the roll, taking measurements in the spectral range of Vis-fUV from 1.5-6.5 eV. The method can be used in-line to monitor and control in real-time the printing and surface or bulk treatment processes on flexible rolls or sheets both along and across the web or sheet, in the air or in an environment of nitrogen or other gas, resulting in the production of flexible organic and printed electronic devices such as organic photovoltaics, organic light-emitting diodes etc with controlled and tailored functional properties. |
