| 摘要 |
A turbo-molecular pump comprises a rotor (4) including multiple stage rotary vanes (19), multiple stage fixed vanes (21), and a pump casing (7) which is provided with a pump suction port (7a) and stores the rotor (4) and the multiple fixed vanes (21). The surface of the rotor (4) facing the suction port has a first emissivity, a surface of one vane stage visible from the suction port among a plurality of vane stages constituted of the rotary vanes (19) and the fixed vanes (21) has the first emissivity, and the surface of one vane stage invisible from the suction port among the plurality of vane stages, has a second emissivity which is larger than the first emissivity. |
