| 摘要 |
<p>A hard-coated member comprising a substrate made of cemented carbide or high-speed steel and a titanium carbonitride layer formed on the substrate by a chemical vapor deposition method, the titanium carbonitride layer comprising first to third layers each having a columnar crystal structure in this order from the side of the substrate, the second layer being smaller than the first layer in carbon concentration, and the third layer being smaller than the second layer in carbon concentration, and an indexable rotary tool comprising it. The first layer is formed by using a starting material gas comprising a TiCl 4 gas, an N 2 gas, a C 2 -C 5 hydrocarbon gas and an H 2 gas, the second layer is formed by using a starting material gas comprising a TiCl 4 gas, an N 2 gas, an organic cyanide gas, a C 2 -C 5 hydrocarbon gas, and an H 2 gas, and the third layer is formed by using a starting material gas comprising a TiCl 4 gas, an N 2 gas, an organic cyanide gas, whose amount is smaller than in the second layer, and an H 2 gas.</p> |
