APPARATUS FOR MAKING GRANULAR POLYSILICON

摘要

The present invention relates to a reactor for producing granular polysilicon. The reactor for producing granular polysilicon of the present invention includes a reactor body forming a space for producing the granular polysilicon using pyrolysis reaction of silane gas. The reactor body comprises the following: a reactor lower body with a first diameter (D1); and a reactor upper body with a second diameter (D2) bigger than the first diameter (D1), connected to the reactor lower body on the upper side of the reactor lower body.