发明名称 |
PLACING TABLE STRUCTURE, FILM FORMING APPARATUS, AND RAW MATERIAL RECOVERY METHOD |
摘要 |
<p>Provided is a mounting table structure for use in forming a thin film on a surface of a target object mounted on the mounting table structure by using a raw material gas including an organic metal compound in a processing chamber. The mounting table structure includes: a mounting table main body which mounts thereon the target object and has therein a heater; and a base which supports the mounting table main body while surrounding a side surface and a bottom surface of the mounting table main body, the base having therein a coolant path where a coolant flows therethrough and being maintained at a temperature higher than the solidification temperature or the liquefaction temperature of the raw material gas, but lower than the decomposition temperature of the raw material gas.</p> |
申请公布号 |
KR101359070(B1) |
申请公布日期 |
2014.02.05 |
申请号 |
KR20117020855 |
申请日期 |
2010.03.03 |
申请人 |
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发明人 |
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分类号 |
C23C16/458;H01L21/02;H01L21/205;H01L21/683 |
主分类号 |
C23C16/458 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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