| 摘要 |
Power supply device for a crucible heater of a crystal growing system according to vertical gradient freeze method, comprises at least one heating circuit with at least two power supply modules (12, 14, 16, 18, 20) and a process control device (42) for controlling the power supply modules. The power supply modules comprise at least one switching network part (34). Each switching network part is controlled individually with a reference value (66) for direct current and alternating current component, which are tapped on the output side. Independent claims are also included for: (1) operating the power supply device for the crucible heater of the crystal growing system, comprising controlling the switching network part by the process control device for presetting heating power of the crucible heater, where the switching network part is controlled by the process control device individually with a reference value for direct current component, which is tapped on the output side, and a reference value for alternating current component, which is tapped on output side, for presetting the heating power of the crucible heater and for presetting an electromagnetic alternating field generated on the crucible heater; (2) a computer program or computer program product comprising a program code means, which is stored on a computer legible data carrier, for carrying out the above mentioned method, when the computer program or computer program product is led to the process control device and heating control device; (3) a digital storage medium comprising electronically readable control signals, which mutually interact with the programmable process control device and heating control device, for carrying out the above mentioned method; and (4) the process control device and heating control device comprising a processing unit and a memory, where the computer program is loaded in the memory, which is led during operation of the device by the processing unit. |
