| 摘要 |
The present invention provides an air supply apparatus including a heater, which is capable of realizing the miniaturized and highly integrated properties. The heater heats the air flowing in a flow path. In the air supply apparatus (10), each flow path block (20) is a rectangular body formed in the shape of stretched long strap and comprises a top face (20a) embarking a plurality of switch valves (50). The plurality of switch valves (50) is arranged in line along the length direction of the top face (20a). A plurality of the flow path blocks (20) are arranged in parallel so that the two sides (20c) holding the top face (20a) in the width direction are adjacent to each other. Under the condition of the neighboring sides (20c) of the flow path blocks (20) holding the heater (31), the flow path blocks (20) integrate with each other. The heater (31) is formed in the shape of membrane while its two sides are opposite to the sides (20c) of the flow path blocks (20) and extend along the length direction of the flow path blocks (20). |
