发明名称 |
Method of fabricating a compliant membrane probe |
摘要 |
A method for fabricating a compliant membrane probe for communication with an integrated circuit includes installing an array of conductive structures within a flexible membrane, the conductors comprising a beam structure having a first end and a second end, with each one of the conductors further comprising a probe tip extending from the first end, the probe tip having a throat generally surrounded by material of the flexible membrane and a head at an end of the throat such that the head is disposed at an opposite side of the flexible membrane with respect to the beam structure; and configuring the second end of the beam structure so as to be supported by a first end of the beam structure of an adjacent conductor thereto. |
申请公布号 |
US8640324(B2) |
申请公布日期 |
2014.02.04 |
申请号 |
US20090631916 |
申请日期 |
2009.12.07 |
申请人 |
AUDETTE DAVID M.;HAGIOS JOHN F.;SULLIVAN CHRISTOPHER L.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
AUDETTE DAVID M.;HAGIOS JOHN F.;SULLIVAN CHRISTOPHER L. |
分类号 |
G01R31/28 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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