发明名称 |
Highly ordered structure pyrolitic graphite or carbon-carbon composite cathodes for plasma generation in carbon containing gases |
摘要 |
A cathode electrode for plasma generation. The cathode is made of graphite with highly ordered structure such as Pyrolitic Graphite or Carbon-Carbon composites. Furthermore, carbon containing gases will be used as plasma gas. The cathode will allow for theoretically an unlimited lifetime of the cathode. |
申请公布号 |
US8642917(B2) |
申请公布日期 |
2014.02.04 |
申请号 |
US201213438664 |
申请日期 |
2012.04.03 |
申请人 |
PERSHIN VALERIAN;MOSTAGHIMI JAVAD;CHEN LIMING |
发明人 |
PERSHIN VALERIAN;MOSTAGHIMI JAVAD;CHEN LIMING |
分类号 |
B23K10/00 |
主分类号 |
B23K10/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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