发明名称 IMPRINT LITHOGRAPHY SYSTEM
摘要 The present invention is directed towards a choice of the shape of the patterned fields for Level 0 (patterned by imprint or photolithography or e-beam, etc.) and Level 1 (patterned by imprint) such that these shapes when tessellated together eliminate the open areas causes by the moats.
申请公布号 KR101357815(B1) 申请公布日期 2014.02.04
申请号 KR20087016346 申请日期 2007.04.03
申请人 发明人
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
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