发明名称 Transmission electron microscope and method of operating a transmission electron microscope
摘要 A transmission electron microscope comprises a high-voltage source for outputting a high voltage at two high-voltage outputs and outputting a control signal at a controller output; a focusing lens for focusing a beam; a monochromator which allows only those particles of the particle beam to pass whose kinetic energy is within an adjustable energy interval; an energy-dispersive component which deflects particles of different kinetic energies differently; a detector; and a controller connected to the controller output, which controls a beam deflector, arranged between the energy-dispersive component and the detector, the monochromator, or the energy-dispersive component in dependence on the control signal, or superposes plural of intensity distributions detected by the detector with an offset relative to one another, which offset is set in dependence on the control signal.
申请公布号 US8642956(B2) 申请公布日期 2014.02.04
申请号 US201113337033 申请日期 2011.12.23
申请人 FOBER JOERG;CARL ZEISS MICROSCOPY GMBH 发明人 FOBER JOERG
分类号 H01J37/26;G01N23/00;G21K5/00 主分类号 H01J37/26
代理机构 代理人
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