| 发明名称 |
Substrate temperature regulation fixed apparatus |
| 摘要 |
A substrate temperature regulation fixed apparatus has a base substance on which a vacuumed object is placed, an adhesive layer and a base plate. The base substance is fixed on the base plate through the adhesive layer. The adhesive layer contains a substance having plasma resistance. |
| 申请公布号 |
US8641825(B2) |
申请公布日期 |
2014.02.04 |
| 申请号 |
US20090482482 |
申请日期 |
2009.06.11 |
| 申请人 |
YONEKURA HIROSHI;SAITO MIKI;TAMAGAWA KOKI;SHINKO ELECTRIC INDUSTRIES CO., LTD. |
发明人 |
YONEKURA HIROSHI;SAITO MIKI;TAMAGAWA KOKI |
| 分类号 |
C23C16/50;C23C16/00;C23F1/00;H01L21/306 |
主分类号 |
C23C16/50 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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