VALVE FOR MAINTAINING VACUUM AND SCANNING ELECTRON MICROSCOPE USING THE SAME

摘要

The present invention relates to a vacuum maintenance valve and a scanning electron microscope using the same, the vacuum maintenance valve and the scanning microscope using the same in the present invention includes: a body unit which receives power from the outside to perform a translation motion along the wall surface of the chamber; a stopper which is located on the chamber and has a rotary roller; a valve unit which is moving while being connected to the body unit and opening/closing the chamber by being converted into one among the direction to the aperture side or the direction apart from the aperture while being in contact with the rotary roller; and a rotary member which is located on the body unit to face the rotary roller and guides a moving direction of the valve unit by being in contact with the other surface of the valve unit to maintain the inside of a chamber by sealing an aperture which is formed in the chamber. Therefore, according to the present invention, the vacuum maintenance valve and the scanning electron microscope using the same are provided to suppress the generation of dusts by preventing impact which is generated when the body unit moves forwards or backwards by making a motion of the valve unit be guided by the rotary roller and the rotary member.