| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning method of an electronic material exhibiting high cleaning effect.SOLUTION: In the cleaning method of an electronic material for cleaning an electronic material with hydrogen dissolved water, the electronic material is cleaned with hydrogen dissolved water of 60-90°C. Preferably, the electronic material is cleaned with ultra pure water which is heated to 60-90°C after being deaerated and hydrogen gas is dissolved therein. Preferably, the temperature of the hydrogen dissolved water is 65-85°C. Hydrogen concentration of the hydrogen dissolved water is preferably 0.1-1.4 mg/L, more preferably 0.5-1.2 mg/L. |
