| 摘要 |
The present invention relates to a product which is designed to have green growth as a purpose by commercializing a toxic substance collecting technique in an environment in which a generation of toxic compound is concerned according to have oxidation and reaction of gas which is generated when working in a fabrication facility (FAB) in which a toxic gas like nitrogen, variance, aulfuric acid which are generated in an semiconductor industrial process and bad smell inducing substance supplying facilities are concentrated; by reducing a discharging of environmental substance; by ultimately reducing a damage which reaches to a worker's working environment; by maintaining an indoor cleanliness of a semiconductor producing facility by purifying a contaminated air inside the workplace, thereby contributing to prevent pollution and stabilize facilities of the clean room; by reducing an environmental pollution in further. The present invention has an effect of contributing to increase the yield rate by securing a high cleanliness with regard to a manufacturing process inside the semiconductor clean room; providing an energy reduction; securing a worker safety by disassembling, adsorbing the toxic substance of an environment; contributing to green growth by reducing an air pollutant discharge; enhancing an environmental performance by using recycled materials; helping the green growth by disassembling, adsorbing a pollutant which effects to climate changes thereby reducing an air pollutant discharge; reducing a waste by using recycled materials; contributing to prevent pollution and stabilize facility by having a clean environmental technique which collects toxic compound which is generated through oxidation and reaction in the manufacturing process of the semiconductor. [Reference numerals] (AA) Movable complex environmental friendly semiconductor clean filter unit dimension; (BB) Movable drawing inside the clean room FAB; (CC) Condtion of inside the semiconductor FAB |
