| 摘要 |
PROBLEM TO BE SOLVED: To provide a wavelength variable interference filter in which accuracy for controlling a gap amount in a gap between reflection films can be enhanced.SOLUTION: A wavelength variable interference filter 5 includes a fixed substrate 51 and a movable substrate 52 opposing to each other. The fixed substrate 51 includes a fixed reflection film 541, a first drive electrode 551, and a first capacitance detection electrode 561; and the movable substrate 52 includes a movable reflection film 542 spaced by a gap G1 between the reflection films from the fixed reflection film 541, a second drive electrode 552 spaced by a gap G2 between drive electrodes from the first drive electrode 551, and a second capacitance detection electrode 562 spaced by a gap G3 between capacitance detection electrodes from the first capacitance detection electrode 561. The capacitance detection electrodes 561, 562 are disposed to detect an electrostatic capacitance between the capacitance detection electrodes. The gap amount of the gap G1 between reflection films is varied by the drive electrodes 551, 552. The gap G1 between reflection films, the gap G2 between drive electrodes and the gap G3 between capacitance detection electrodes have different gap amounts from one another. |
