| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning microscope capable of controlling scanning means and achieving reduction in size and cost without using special equipment.SOLUTION: A scanning microscope 100 includes: a light source 1; an objective lens 5 that condenses illumination light 20 onto the surface of an observation object 2; a transmission plate 10 that transmits the illumination light and has a scale pattern 11 on the surface thereof; a detector 8 that detects reflected light 20s from the observation object; scanning means 3, 7 to move the illumination light on the surface of the observation object; and an image processing device 9 that creates an image from the information from the detector and the scanning means and controls movement of the illumination light of the scanning means based on an image of the scale pattern in the created image. |
