SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

摘要

A substrate is returned based on coordinate information displaying the location of receiving a substrate and the location of placing a substrate by a hand. If the substrate is misaligned from a first location, the substrate is received by the hand with the center of the substrate misaligned from a regular location of the hand. The hand for holding the substrate moves toward a second location. Before putting the substrate, multiple parts of the peripheral part of the substrate are detected. According to the detection result, a misalignment of the substrate is detected regarding the regular location of the hand, and the coordinate information is corrected to offset the misalignment between the location of the center of the substrate being put by the hand and the center of the second location regarding the second location. [Reference numerals] (AA) First and second locations; (BB,EE) Receive a substrate; (CC,FF,HH) Place a substrate; (DD) If the substrate is misaligned from a first location; (GG) Detect a misalignment