| 摘要 |
PROBLEM TO BE SOLVED: To provide a humidity sensor unit constituted of a sensor chip and a circuit chip arranged side by side, and capable of suppressing the deterioration of the accuracy of temperature detection.SOLUTION: A temperature detection section 210 is constituted of resistors 221a and 221b whose resistance values change in accordance with a temperature, the resistors which being formed along temperature distribution generated by a circuit chip 30. The resistors 221a and 221b are formed along the temperature distribution so that it is possible to suppress variations in the temperature distribution in the resistors 221a and 221b, and to suppress the deterioration of the accuracy of temperature detection. |
