| 摘要 |
PROBLEM TO BE SOLVED: To improve the detecting accuracy of a defect.SOLUTION: The defect inspection method comprises: an irradiation process of irradiating an object to be inspected with visible rays of light and invisible rays of light from a light source; a data generation process of respectively receiving the visible rays of light and the invisible rays of light reflected on the object to be inspected or transmitted through the object to be inspected, and respectively generating image pickup data corresponding to the respective received light quantity; and a determination process of, when the result of the comparison of the degrees of fluctuation of the image pickup data in respective regions where the image pickup data fluctuate with respect to the visible rays of light and the invisible rays of light belongs to a preliminarily stored defect-definable range, determining that the object to be inspected is defective. |
