LIGHT IRRADIATION DEVICE, NANO-IMPRINT DEVICE, TEMPLATE CLEANING METHOD, AND PATTERN FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To provide: a light irradiation device which can sufficiently and reliably remove a foreign matter adhering to an object to be irradiated; a nano-imprint device which can reliably form a pattern having less defects; a template cleaning method which can sufficiently and reliably remove resist residues adhering to a template for a nano-imprint; and a pattern forming method which can reliably form a pattern having less defects.SOLUTION: The light irradiation device which has a housing and an ultraviolet light lamp that is disposed in the housing and emits vacuum ultraviolet light has a filter provided between an object to be irradiated and the ultraviolet light lamp, for intercepting or attenuating oblique light an incident angle of which exceeds a specific angle.